Join AIM Photonics Process Integration Engineer Dr. Soumen Kar at the Advanced Semiconductor Manufacturing Conference (ASMC) in Albany, New York. Dr. Kar will present on “Compositional Analysis of Thick Silicon Nitride Films Using X-ray Photoelectron Spectroscopy.”

ASMC brings together manufacturers, equipment and materials suppliers, and academia to solve manufacturing challenges with innovative strategies and methodologies.

Soumen Kar

Session 16: Advanced Metrology 3
Compositional Analysis of Thick Silicon Nitride Films Using X-ray Photoelectron Spectroscopy
Thursday, May 8, 8:20 a.m.